Chemical vapour deposition precursors, processes and applications
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| Other Authors: | , |
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| Format: | Unknown |
| Published: |
Cambridge, UK
Royal Society of Chemistry
2009
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xv, 582 p. ill. (some col.), plans 26 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780854044658 (hbk.) 0854044655 (hbk.) |
Chemical vapor deposition principles and applications 
Reactive sputter deposition