Chemical vapour deposition precursors, processes and applications
Saved in:
| Other Authors: | , |
|---|---|
| Format: | Book |
| Published: |
Cambridge, UK
Royal Society of Chemistry
2009
|
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Add Tag | Physical Description: | xv, 582 p. ill. (some col.), plans 26 cm |
|---|---|
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780854044658 (hbk.) 0854044655 (hbk.) |
Chemical vapor deposition principles and applications