Introductory MEMS fabrication and applications

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Bibliographic Details
Main Author:	Adams, Thomas M.
Other Authors:	Layton, Richard A.
Format:	Unknown
Published:	New York Springer 2010
Subjects:	Transducers Electronic apparatus and appliances Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 9780387095103 (hbk.)
020	#	#	\|a 0387095101 (hbk.)
040	#	#	\|a ITD \|d ITMB
090	0	0	\|a TK7875 \|b .A33 2010
100	1	#	\|a Adams, Thomas M.
245	1	0	\|a Introductory MEMS \|b fabrication and applications \|c Thomas M. Adams, Richard A Layton
260	#	#	\|a New York \|b Springer \|c 2010
300	#	#	\|a xv, 444 p. \|b ill. (some col.) \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Transducers
650	#	0	\|a Electronic apparatus and appliances
650	#	0	\|a Microelectromechanical systems
700	1	#	\|a Layton, Richard A.
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=426431
964	#	#	\|c BOK \|d EE
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