Mechanics and physics of precise vacuum mechanisms
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Other Authors: | Deulin, E. A., Mikhailov, V. P., Panfilov, Y. V., Nevshupa, R. A. |
---|---|
Format: | Book |
Published: |
Dordrecht
Springer
2010
|
Series: | Fluid mechanics and its applications
v. 91 |
Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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