Mechanics and physics of precise vacuum mechanisms

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Bibliographic Details
Other Authors:	Deulin, E. A., Mikhailov, V. P., Panfilov, Y. V., Nevshupa, R. A.
Format:	Book
Published:	Dordrecht Springer 2010
Series:	Fluid mechanics and its applications v. 91
Subjects:	Vacuum technology
Online Access:	Click Here to View Status and Holdings.
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