Mechanics and physics of precise vacuum mechanisms

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Bibliographic Details
Other Authors:	Deulin, E. A., Mikhailov, V. P., Panfilov, Y. V., Nevshupa, R. A.
Format:	Book
Published:	Dordrecht Springer 2010
Series:	Fluid mechanics and its applications v. 91
Subjects:	Vacuum technology
Online Access:	Click Here to View Status and Holdings.
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090	0	0	\|a TJ940 \|b .M43 2010
245	0	0	\|a Mechanics and physics of precise vacuum mechanisms \|c E.A. Deulin ... [et al.]
260	#	#	\|a Dordrecht \|b Springer \|c 2010
300	#	#	\|a xiv, 234 p. \|b ill. \|c 24 cm
490	1	#	\|a Fluid mechanics and its applications \|v v. 91
504	#	#	\|a Includes bibliographical references
650	#	1	\|a Vacuum technology
700	1	#	\|a Deulin, E. A.
700	#	#	\|a Mikhailov, V. P.
700	#	#	\|a Panfilov, Y. V.
700	#	#	\|a Nevshupa, R. A.
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=425220
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