Mechanics and physics of precise vacuum mechanisms
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| Other Authors: | , , , |
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| Format: | Book |
| Published: |
Dordrecht
Springer
2010
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| Series: | Fluid mechanics and its applications
v. 91 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xiv, 234 p. ill. 24 cm |
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| Bibliography: | Includes bibliographical references |
| ISBN: | 9789048125197 9048125197 |
Vacuum technology