MEMS and microsystems design, manufacture, and nanoscale engineering

MEMS and microsystems design, manufacture, and nanoscale engineering

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Bibliographic Details
Main Author:	Hsu, Tai-Ran
Format:	Book
Published:	Hoboken, NJ John Wiley 2008
Edition:	2nd ed
Subjects:	Microelectronics Microelectronic packaging Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
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