MEMS and microsystems design, manufacture, and nanoscale engineering

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Bibliographic Details
Main Author:	Hsu, Tai-Ran
Format:	Unknown
Published:	Hoboken, NJ John Wiley 2008
Edition:	2nd ed
Subjects:	Microelectronics Microelectronic packaging Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
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090	0	0	\|a TK7874 \|b .H794 2008
100	1	#	\|a Hsu, Tai-Ran
245	1	0	\|a MEMS and microsystems \|b design, manufacture, and nanoscale engineering \|c Tai-Ran Hsu
250	#	#	\|a 2nd ed
260	#	#	\|a Hoboken, NJ \|b John Wiley \|c 2008
300	#	#	\|a xxv, 550 p. \|b ill. \|c 25 cm
504	#	#	\|a Includes bibliographical references (p. 509-521) and index
650	#	0	\|a Microelectronics
650	#	0	\|a Microelectronic packaging
650	#	0	\|a Microelectromechanical systems
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=424336
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