MEMS and microsystems design, manufacture, and nanoscale engineering

MEMS and microsystems design, manufacture, and nanoscale engineering

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Bibliographic Details
Main Author: Hsu, Tai-Ran
Format: Book
Published: Hoboken, NJ John Wiley 2008
Edition:2nd ed
Subjects:
Microelectronics
Microelectronic packaging
Microelectromechanical systems
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xxv, 550 p. ill. 25 cm
Bibliography:Includes bibliographical references (p. 509-521) and index
ISBN:9780470083017 (cloth)
0470083018 (cloth)

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