Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications

• Main Author: Madou, Marc J. (Author)
• Format: Book
• Language: English
• Published: Boca Raton CRC Press 2012
• Edition: Third Edition
• Subjects: Microelectromechanical systems > Design and construction; Nanoelectromechanical systems; Microelectronics; Microfluidics > Design and construction; Microfabrication; Machining; Solid state physics; Nanostructured materials > Design and construction; Integrated circuits > Design and construction
• Online Access: Click Here to View Status and Holdings.

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistr...

Table of Contents:

• v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
• v. 2. Manufacturing techniques for microfabrication and nanotechnology
• v. 3. From MEMS to bio-MEMS and bio-Nems, manufacturing techniques and applications