Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications

Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistr...

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Bibliographic Details
Main Author: Madou, Marc J. (Author)
Format: Book
Language:English
Published: Boca Raton CRC Press 2012
Edition:Third Edition
Subjects:
Microelectromechanical systems > Design and construction
Nanoelectromechanical systems
Microelectronics
Microfluidics > Design and construction
Microfabrication
Machining
Solid state physics
Nanostructured materials > Design and construction
Integrated circuits > Design and construction
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