Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistr...
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| Format: | Book |
| Language: | English |
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Boca Raton
CRC Press
2012
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| Edition: | Third Edition |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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| 100 | 1 | # | |a Madou, Marc J. |e author |
| 245 | 1 | 0 | |a Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III |b From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications |c Marc J. Madou |
| 250 | # | # | |a Third Edition |
| 264 | # | 1 | |a Boca Raton |b CRC Press |c 2012 |
| 264 | # | 4 | |c ©2012 |
| 300 | # | # | |a 3 volume |b some colour illustrations |c 29 cm |
| 336 | # | # | |a text |2 rdacontent |
| 337 | # | # | |a unmediated |2 rdamedia |
| 338 | # | # | |a volume |2 rdacarrier |
| 500 | # | # | |a Rev. ed. of : Fundamentals of microfabrication. 2002 |
| 504 | # | # | |a Includes bibliographical references and index |
| 505 | 1 | # | |a v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-Nems, manufacturing techniques and applications |
| 520 | # | # | |a From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms |
| 650 | # | 0 | |a Microelectromechanical systems |x Design and construction |
| 650 | # | 0 | |a Nanoelectromechanical systems |
| 650 | # | 0 | |a Microelectronics |
| 650 | # | 0 | |a Microfluidics |x Design and construction |
| 650 | # | 0 | |a Microfabrication |
| 650 | # | 0 | |a Machining |
| 650 | # | 0 | |a Solid state physics |
| 650 | # | 0 | |a Nanostructured materials |x Design and construction |
| 650 | # | 0 | |a Integrated circuits |x Design and construction |
| 740 | 1 | # | |a Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology |
| 740 | # | # | |a Manufacturing techniques for microfabrication and nanotechnology |
| 740 | # | # | |a From MEMS to bio-MEMS and bio-Nems, manufacturing techniques and applications |
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