Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications

• Main Author: Madou, Marc J. (Author)
• Format: Book
• Language: English
• Published: Boca Raton CRC Press 2012
• Edition: Third Edition
• Subjects: Microelectromechanical systems > Design and construction; Nanoelectromechanical systems; Microelectronics; Microfluidics > Design and construction; Microfabrication; Machining; Solid state physics; Nanostructured materials > Design and construction; Integrated circuits > Design and construction
• Online Access: Click Here to View Status and Holdings.
• Item Description: Rev. ed. of : Fundamentals of microfabrication. 2002
• Physical Description: 3 volume some colour illustrations 29 cm
• Bibliography: Includes bibliographical references and index
• ISBN: 9781420055160

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms