Defects in Microelectronic Materials and Devices
Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes requi...
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
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Boca Raton
CRC Press
2009
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Field effect devices
Fundamentals of Modern VLSI Devices
