Defects in Microelectronic Materials and Devices

Defects in Microelectronic Materials and Devices

Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes requi...

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Bibliographic Details
Other Authors: Fleetwood, Daniel M. (Editor), Pantelides, Sokrates T. (Editor), Schrimpf, Ronald Donald (Editor)
Format: Book
Language:English
Published: Boca Raton CRC Press 2009
Subjects:
Microelectronics > Testing > Materials
Metal oxide semiconductor field-effect transistors > Testing
Integrated circuits > Defects > Testing
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