Plasma electronics applications in microelectronic device fabrication

Saved in:

Bibliographic Details
Main Author:	Makabe, T. Toshiaki
Other Authors:	Petroviac, Z.
Format:	Book
Published:	New York Taylor & Francis 2006
Subjects:	Plasma engineering
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-399891
020	#	#	\|a 0750309768
020	#	#	\|a 9780750309769
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TA2020 \|b .M35 2006
100	1	#	\|a Makabe, T. \|q Toshiaki
245	1	0	\|a Plasma electronics \|b applications in microelectronic device fabrication \|c T. Makabe, Z. Petroviac
260	#	#	\|a New York \|b Taylor & Francis \|c 2006
300	#	#	\|a 339 p. \|b ill. \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Plasma engineering
700	1	#	\|a Petroviac, Z.
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=399891
964	#	#	\|c BOK \|d 01