Plasma electronics applications in microelectronic device fabrication
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| Format: | Book |
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New York
Taylor & Francis
2006
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | 339 p. ill. 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0750309768 9780750309769 |
PLASMA ENGINEERING