Comprehensive microsystems
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Amsterdam
Elsevier
2008
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Table of Contents:
- v. 1. Materials. Fabrication and packaging. Electronics and systems design
- v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems
- v. 3. Optical systems. Industrial applications. Emerging topics. Index
Integrated microsystems electronics, photonics, and biotechnology 
Introduction to Microsystem Technology A Guide for Students