Comprehensive microsystems

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Bibliographic Details
Other Authors:	Gianchandani, Yogesh B., Tabata, Osamu 1956-, Zappe, Hans P. 1956-
Format:	Book
Published:	Amsterdam Elsevier 2008
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
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001	wils-389718
020	#	#	\|a 9780444521941 (hbk.)
020	#	#	\|a 0444521941 (hbk.)
040	#	#	\|a UKM \|d ITMB
090	0	0	\|a TK7875 \|b .C66 2008
245	0	0	\|a Comprehensive microsystems \|c editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe
260	#	#	\|a Amsterdam \|b Elsevier \|c 2008
300	#	#	\|a 3 v. \|b ill. (some col.) \|c 27 cm
505	1	#	\|a v. 1. Materials. Fabrication and packaging. Electronics and systems design -- v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems -- v. 3. Optical systems. Industrial applications. Emerging topics. Index
650	#	0	\|a Microelectromechanical systems
700	1	#	\|a Gianchandani, Yogesh B.
700	#	#	\|a Tabata, Osamu \|d 1956-
700	#	#	\|a Zappe, Hans P. \|d 1956-
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=389718
964	#	#	\|c BOK \|d 01