Nanofabrication fundamentals and applications

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Bibliographic Details
Other Authors:	Tseng, A. A. (Ampere A.)
Format:	Book
Published:	Singapore Hackensack, NJ World Scientific 2008
Subjects:	Nanostructured materials Nanostructures Scanning probe microscopy Lithography, Electron beam
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 9789812700766 (hbk.)
020	#	#	\|a 9812700765 (hbk.)
020	#	#	\|a 9789812705426 (pbk.)
020	#	#	\|a 9812705422 (pbk.)
040	#	#	\|a UKM \|d ITMB
090	0	0	\|a TA418.9.N35 \|b N252 2008
245	0	0	\|a Nanofabrication \|b fundamentals and applications \|c editor, Ampere A. Tseng
260	#	#	\|a Singapore \|a Hackensack, NJ \|b World Scientific \|c 2008
300	#	#	\|a viii, 574 p. \|b ill. (some col.) \|c 26 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Nanostructured materials
650	#	0	\|a Nanostructures
650	#	0	\|a Scanning probe microscopy
650	#	0	\|a Lithography, Electron beam
700	1	#	\|a Tseng, A. A. \|q (Ampere A.)
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=388450
964	#	#	\|c BOK \|d 01