Semiconductor manufacturing technology

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Bibliographic Details
Main Author:	Yoo, Chue San
Format:	Book
Published:	Hackensack, NJ World Scientific 2008
Series:	Advanced series in electrical and computer engineering v 13
Subjects:	Semiconductors > Design and construction Semiconductor industry > Design and construction
Online Access:	Click Here to View Status and Holdings.
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100	1	#	\|a Yoo, Chue San
245	1	0	\|a Semiconductor manufacturing technology \|c Chue San Yoo
260	#	#	\|a Hackensack, NJ \|b World Scientific \|c 2008
300	#	#	\|a xii, 470 p. \|b ill. \|c 24 cm
490	1	#	\|a Advanced series in electrical and computer engineering \|v v 13
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Semiconductors \|x Design and construction
650	#	0	\|a Semiconductor industry \|x Design and construction
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