Semiconductor manufacturing technology
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| Main Author: | |
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| Format: | Book |
| Published: |
Hackensack, NJ
World Scientific
2008
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| Series: | Advanced series in electrical and computer engineering
v 13 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xii, 470 p. ill. 24 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9789812568236 9812568239 |
Introduction to Semiconductor Manufacturing Technology