Scaling issues and design of MEMS

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Bibliographic Details
Main Author:	Baglio, S. Salvatore
Other Authors:	Castorina, Salvatore, Savalli, Nicol
Format:	Book
Published:	Chichester, West Sussex, England Hoboken, NJ John Wiley & Sons 2007
Subjects:	Microelectromechanical systems > Design and construction
Online Access:	Click Here to View Status and Holdings.
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