Scaling issues and design of MEMS

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Bibliographic Details
Main Author:	Baglio, S. Salvatore
Other Authors:	Castorina, Salvatore, Savalli, Nicol
Format:	Book
Published:	Chichester, West Sussex, England Hoboken, NJ John Wiley & Sons 2007
Subjects:	Microelectromechanical systems > Design and construction
Online Access:	Click Here to View Status and Holdings.
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040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7875 \|b .B34 2007
100	1	#	\|a Baglio, S. \|q Salvatore
245	1	0	\|a Scaling issues and design of MEMS \|c Salvatore Baglio, Salvatore Castorina, Nicolo Savalli
246	1	#	\|a Scaling issues and design of microelectromechanical systems
260	#	#	\|a Chichester, West Sussex, England \|a Hoboken, NJ \|b John Wiley & Sons \|c 2007
300	#	#	\|a xiii, 229 p. \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems \|x Design and construction
700	1	#	\|a Castorina, Salvatore
700	#	#	\|a Savalli, Nicol
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=384517
964	#	#	\|c BOK \|d 01