Introduction to Microsystem Technology A Guide for Students
This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific discipline.
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Hoboken, NJ
John Wiley & Sons, Ltd.
2008
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| Series: | Wiley Microsystem and Nanotechnology Series
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Summary: | This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific discipline. |
|---|---|
| Physical Description: | xxiii, 351 pages illustrations 26 cm |
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780470058619 0470058617 |
Scaling issues and design of MEMS