Thin film materials stress, defect formation, and surface evolution
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| Format: | Book |
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Cambridge
Cambridge University Press
2003
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xviii, 750 p. ill. 25 cm |
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| Bibliography: | Includes bibliographical references (p. 713-737) and indexes |
| ISBN: | 0521822815 9780521822817 |
Thin-film deposition principles and practice