MEMS technology and devices Suntec, Singapore, 1-6 July 2007

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Bibliographic Details
Corporate Author:	International Conference on Materials for Advanced Technologies
Other Authors:	Liu, Aiqun
Format:	Book
Published:	Singapore Pan Stanford Pub. Distributed by World Scientific Pub. Co. 2007
Subjects:	Nanostructured materials > Congresses Microelectromechanical systems > Congresses
Online Access:	Click Here to View Status and Holdings.
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110	1	#	\|a International Conference on Materials for Advanced Technologies \|c Singapore \|d 2007
245	1	0	\|a MEMS technology and devices \|b Suntec, Singapore, 1-6 July 2007 \|c Aiqun Liu...[et al.]
260	#	#	\|a Singapore \|b Pan Stanford Pub. \|b Distributed by World Scientific Pub. Co. \|c 2007
300	#	#	\|a xv, 441 p. \|b ill. \|c 24 cm. \|e 1 CD-ROM (4 3/4 in.)
500	#	#	\|a "ICMAT 2007 conference proceedings"--T.p. verso
504	#	#	\|a Includes bibliographical references
650	#	0	\|a Nanostructured materials \|x Congresses
650	#	0	\|a Microelectromechanical systems \|x Congresses
700	1	#	\|a Liu, Aiqun
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