Microelectronic applications of chemical mechanical planarization

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Bibliographic Details
Other Authors:	Li, Yuzhuo
Format:	Unknown
Published:	Hoboken, NJ Wiley-Interscience 2008
Subjects:	Integrated circuits > Design and construction Chemical mechanical planarization > Design and construction Microelectronics > Materials
Online Access:	Click Here to View Status and Holdings.
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090	0	0	\|a TK7874 \|b .M4675 2008
245	0	0	\|a Microelectronic applications of chemical mechanical planarization \|c edited by Yuzhuo Li
260	#	#	\|a Hoboken, NJ \|b Wiley-Interscience \|c 2008
300	#	#	\|a xxv, 734 p. \|b ill. \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Integrated circuits \|x Design and construction
650	#	0	\|a Chemical mechanical planarization \|x Design and construction
650	#	0	\|a Microelectronics \|x Materials
700	1	#	\|a Li, Yuzhuo
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=378626
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