Microelectronic applications of chemical mechanical planarization

Microelectronic applications of chemical mechanical planarization

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Bibliographic Details
Other Authors: Li, Yuzhuo
Format: Unknown
Published: Hoboken, NJ Wiley-Interscience 2008
Subjects:
Integrated circuits > Design and construction
Chemical mechanical planarization > Design and construction
Microelectronics > Materials
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xxv, 734 p. ill. 25 cm
Bibliography:Includes bibliographical references and index
ISBN:9780471719199
0471719196

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