MEMS packaging
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| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Unknown |
| Published: |
London
INSPEC
2004
|
| Series: | EMIS processing series
no. 3 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Mems and microsystems design and manufacture design and manufacture
Feedback control of MEMS to atoms
