Foundations of MEMS
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| Main Author: | |
|---|---|
| Format: | Book |
| Published: |
New Jersey
Pearson Education
2006
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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| LEADER | 00000n a2200000 a 4501 | ||
|---|---|---|---|
| 001 | wils-367203 | ||
| 020 | 0 | 0 | |a 013199204X |
| 020 | 0 | 0 | |a 9780131992047 |
| 040 | # | # | |a ITMB |
| 090 | 0 | 0 | |a TK7875 |b .L48 2006 |
| 100 | 1 | 0 | |a Liu, Chang |
| 245 | 1 | 0 | |a Foundations of MEMS |c Chang Liu |
| 260 | 0 | 0 | |a New Jersey |b Pearson Education |c 2006 |
| 300 | 0 | 0 | |a xxi, 530 p. |b ill. |c 24 cm |
| 504 | 0 | 0 | |a Includes bibliographical references and index |
| 650 | # | 0 | |a Microelectromechanical systems |
| 856 | 4 | 0 | |z Click Here to View Status and Holdings. |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=367203 |
| 964 | # | # | |c BOK |d 01 |
Foundations of MEMS