Plasma-aided nanofabrication from plasma sources to nanoassembly

Plasma-aided nanofabrication from plasma sources to nanoassembly

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Bibliographic Details
Main Author:	Ostrikov, K. Kostya
Other Authors:	Xu, Shuyan
Format:	Book
Published:	Weinheim Wiley-VCH Verlag GmbH 2007
Subjects:	Manufacturing processes Plasma engineering Nanostructured materials Low temperature plasmas
Online Access:	Click Here to View Status and Holdings.
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