Plasma-aided nanofabrication from plasma sources to nanoassembly

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Bibliographic Details
Main Author:	Ostrikov, K. Kostya
Other Authors:	Xu, Shuyan
Format:	Book
Published:	Weinheim Wiley-VCH Verlag GmbH 2007
Subjects:	Manufacturing processes Plasma engineering Nanostructured materials Low temperature plasmas
Online Access:	Click Here to View Status and Holdings.
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001	wils-366858
020	#	#	\|a 9783527406333
020	#	#	\|a 3527406336
040	#	#	\|a UKM \|d ITMB
090	0	0	\|a TA418.9.N35 \|b O87 2007
100	1	#	\|a Ostrikov, K. \|q Kostya
245	1	0	\|a Plasma-aided nanofabrication \|b from plasma sources to nanoassembly \|c Kostya (Ken) Ostrikov and Shuyan Xu
260	#	#	\|a Weinheim \|b Wiley-VCH Verlag GmbH \|c 2007
300	#	#	\|a xiii, 300 p. \|b ill. (some col.) \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Manufacturing processes
650	#	0	\|a Plasma engineering
650	#	0	\|a Nanostructured materials
650	#	0	\|a Low temperature plasmas
700	1	#	\|a Xu, Shuyan
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=366858
964	#	#	\|c BOK \|d 01
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