Semiconductor manufacturing handbook

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Bibliographic Details
Other Authors: Geng, Hwaiyu
Format: Book
Published: New York McGraw-Hill 2005
Series:McGraw-Hill handbooks
Subjects:
Online Access:Click Here to View Status and Holdings.
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LEADER 00000n a2200000 a 4501
001 wils-366691
020 0 0 |a 0071445595 (alk. paper) 
020 0 0 |a 9780071445597 
040 # # |a DLC  |d ITMB 
090 0 0 |a TK7871.85  |b .S42935 2005 
245 0 0 |a Semiconductor manufacturing handbook  |c Hwaiyu Geng, editor in chief 
260 0 0 |a New York  |b McGraw-Hill  |c 2005 
300 0 0 |a 1 v. (various pagings)  |b ill.  |c 25 cm 
490 0 0 |a McGraw-Hill handbooks 
504 0 0 |a Includes bibliographical references and index 
650 # 0 |a Semiconductors  |x Design and construction  |x Handbooks, manuals, etc 
650 # 0 |a Integrated circuits  |x Design and construction  |x Handbooks, manuals, etc 
700 1 1 |a Geng, Hwaiyu 
856 4 0 |z Click Here to View Status and Holdings.  |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=366691 
964 # # |c BOK  |d 01