MEMS/NEMS handbook techniques and applications

MEMS/NEMS handbook techniques and applications

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Bibliographic Details
Other Authors: Leondes, Cornelius T.
Format: Book
Published: New York Springer 2006
Subjects:
Microelectromechanical systems > Design and construction
Nanotechnology
Online Access:Click Here to View Status and Holdings.
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Table of Contents:
  • v. 1. Design methods
  • v. 2. Fabrication techniques
  • v. 3. Manufacturing methods
  • v. 4. Sensors and actuators
  • v. 5. Medical applications and MOEMS

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