MEMS/NEMS handbook techniques and applications

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Bibliographic Details
Other Authors:	Leondes, Cornelius T.
Format:	Unknown
Published:	New York Springer 2006
Subjects:	Microelectromechanical systems > Design and construction Nanotechnology
Online Access:	Click Here to View Status and Holdings.
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040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK153 \|b .M446 2006
245	1	1	\|a MEMS/NEMS \|b handbook techniques and applications \|c edited by Cornelius T. Leondes
260	#	#	\|a New York \|b Springer \|c 2006
300	#	#	\|a 5 v. \|b ill. \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
505	1	#	\|a v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS
650	#	0	\|a Microelectromechanical systems \|x Design and construction
650	#	0	\|a Nanotechnology
700	1	#	\|a Leondes, Cornelius T.
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=361393
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