MEMS/NEMS handbook techniques and applications
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| Format: | Book |
| Published: |
New York
Springer
2006
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | 5 v. ill. 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0387245200 (set) 9780387245201 (set) 9780387245202 (set) 0387257861 (vol. 1) 9780387257862 (vol. 1) 0387257861 (vol. 2) 9780387257862 (vol. 2) 0387257861 (vol. 3) 9780387257862 (vol. 3) 0387257861 (vol. 4) 9780387257862 (vol. 4) 0387257861 (vol.5) 9780387257862 (vol. 5) |
MEMS and NEMS systems, devices, and structures