Fundamentals of semiconductor fabrication

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Bibliographic Details
Main Author:	May, Gary S.
Other Authors:	Sze, S. M. 1936-
Format:	Book
Published:	New York John Wiley & Sons, Inc. 2004
Subjects:	Semiconductors > Design and construction Integrated circuits > Design and construction
Online Access:	Click Here to View Status and Holdings.
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245	1	1	\|a Fundamentals of semiconductor fabrication \|c Gary S. May, Simon M. Sze
260	#	#	\|a New York \|b John Wiley & Sons, Inc. \|c 2004
300	#	#	\|a xiii, 305 p. \|b ill. \|c 26 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Semiconductors \|x Design and construction
650	#	0	\|a Integrated circuits \|x Design and construction
700	1	#	\|a Sze, S. M. \|d 1936-
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