X-ray metrology in semiconductor manufacturing

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Bibliographic Details
Main Author:	Bowen, D. Keit 1940- (David Keith)
Other Authors:	Tanner, B. K. (Brian Keith)
Format:	Unknown
Published:	Boca Raton CRC/Taylor & Francis 2006
Subjects:	Semiconductors > Design and construction > Quality control Integrated circuits > Measurement Semiconductor wafers > Inspection Fluroscopy X-rays > Diffraction
Online Access:	Click Here to View Status and Holdings.
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