X-ray metrology in semiconductor manufacturing

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Bibliographic Details
Main Author:	Bowen, D. Keit 1940- (David Keith)
Other Authors:	Tanner, B. K. (Brian Keith)
Format:	Unknown
Published:	Boca Raton CRC/Taylor & Francis 2006
Subjects:	Semiconductors > Design and construction > Quality control Integrated circuits > Measurement Semiconductor wafers > Inspection Fluroscopy X-rays > Diffraction
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 0849339286 (alk. paper)
090	0	0	\|a TK7874.58 \|b .B69 2006
100	1	#	\|a Bowen, D. Keit \|c 1940- \|q (David Keith)
245	1	1	\|a X-ray metrology in semiconductor manufacturing \|c D. Keith Bowen, Brian K. Tanner
260	#	#	\|a Boca Raton \|b CRC/Taylor & Francis \|c 2006
300	#	#	\|a 279 p. \|b ill. \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Semiconductors \|x Design and construction \|x Quality control
650	#	0	\|a Integrated circuits \|x Measurement
650	#	0	\|a Semiconductor wafers \|x Inspection
650	#	0	\|a Fluroscopy
650	#	0	\|a X-rays \|x Diffraction
700	1	#	\|a Tanner, B. K. \|q (Brian Keith)
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=348886
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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