X-ray metrology in semiconductor manufacturing

X-ray metrology in semiconductor manufacturing

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Bibliographic Details
Main Author: Bowen, D. Keit 1940- (David Keith)
Other Authors: Tanner, B. K. (Brian Keith)
Format: Book
Published: Boca Raton CRC/Taylor & Francis 2006
Subjects:
Semiconductors > Design and construction > Quality control
Integrated circuits > Measurement
Semiconductor wafers > Inspection
Fluroscopy
X-rays > Diffraction
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:279 p. ill. 25 cm
Bibliography:Includes bibliographical references and index
ISBN:0849339286 (alk. paper)

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