Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

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Bibliographic Details
Other Authors:	Jackson, Mark J.
Format:	Book
Published:	Boca Raton, FL Taylor & Francis 2006
Subjects:	Microelectronics > Design and construction Integrated circuits > Design and construction Microelectromechanical systems > Design and construction
Online Access:	Click Here to View Status and Holdings.
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