Microfabrication and nanomanufacturing

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Bibliographic Details
Other Authors:	Jackson, Mark J.
Format:	Unknown
Published:	Boca Raton, FL Taylor & Francis 2006
Subjects:	Microelectronics > Design and construction Integrated circuits > Design and construction Microelectromechanical systems > Design and construction
Online Access:	Click Here to View Status and Holdings.
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MARC


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090	0	0	\|a TK7836 \|b .M523 2006
245	0	0	\|a Microfabrication and nanomanufacturing \|c [edited by] Mark J. Jackson
260	#	#	\|a Boca Raton, FL \|b Taylor & Francis \|c 2006
300	#	#	\|a 401 p. \|b ill. \|c 27 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectronics \|x Design and construction
650	#	0	\|a Integrated circuits \|x Design and construction
650	#	0	\|a Microelectromechanical systems \|x Design and construction
700	1	#	\|a Jackson, Mark J.
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=345501
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