Microfabrication and nanomanufacturing
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| Format: | Unknown |
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Boca Raton, FL
Taylor & Francis
2006
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | 401 p. ill. 27 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780824724313 0824724313 |
Fundamentals of Microfabrication ,the science of miniaturization 
Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications