Alternative lithography unleashing the potentials of nanotechnology
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| Format: | Unknown |
| Published: |
New York
Kluwer Academic/Plenum
2003
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| Series: | Nanostructure science and technology
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xx, 333 p. ill. 26 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0306478587 |
Nano-lithography