Micro process engineering fundamentals, devices, fabrication, and applications

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Bibliographic Details
Other Authors:	Kockmann, Norbert
Format:	Book
Published:	Weinheim [Chichester Wiley-VCH John Wiley [distributor]] 2006
Series:	Advanced micro & nanosystems 5
Subjects:	Production engineering Microtechnology
Online Access:	Click Here to View Status and Holdings.
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