Micro process engineering fundamentals, devices, fabrication, and applications

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Bibliographic Details
Other Authors:	Kockmann, Norbert
Format:	Unknown
Published:	Weinheim [Chichester Wiley-VCH John Wiley [distributor]] 2006
Series:	Advanced micro & nanosystems 5
Subjects:	Production engineering Microtechnology
Online Access:	Click Here to View Status and Holdings.
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001	wils-338393
020	#	#	\|a 3527312463 (hbk.)
040	#	#	\|a UKM \|d ITMB
090	0	0	\|a TS183 \|b .M52 2006
245	1	1	\|a Micro process engineering \|b fundamentals, devices, fabrication, and applications \|c volume editor : Norbert Kockmann
260	#	#	\|a Weinheim \|a [Chichester \|b Wiley-VCH \|b John Wiley [distributor]] \|c 2006
300	#	#	\|a xxii, 507 p. \|b ill. \|c 24 cm
490	1	#	\|a Advanced micro & nanosystems \|v 5
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Production engineering
650	#	0	\|a Microtechnology
700	1	#	\|a Kockmann, Norbert
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=338393
964	#	#	\|c BOK \|d 01
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