Micro process engineering fundamentals, devices, fabrication, and applications

Micro process engineering fundamentals, devices, fabrication, and applications

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Bibliographic Details
Other Authors: Kockmann, Norbert
Format: Book
Published: Weinheim [Chichester Wiley-VCH John Wiley [distributor]] 2006
Series:Advanced micro & nanosystems 5
Subjects:
Production engineering
Microtechnology
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xxii, 507 p. ill. 24 cm
Bibliography:Includes bibliographical references and index
ISBN:3527312463 (hbk.)

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