Engineering thin films and nanostructures with ion beams

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Bibliographic Details
Other Authors:	Knystautas, Emile J
Format:	Book
Published:	Boca Raton, FL : Taylor & Francis, c2005
Series:	Optical engineering 92
Subjects:	Thin films Ion bombardment > Industrial applications Nanostructures
Online Access:	Click Here to View Status and Holdings.
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MARC


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001	wils-338074
020	#	#	\|a 082472447X (alk. paper)
090	0	0	\|a TA418.9.T45 \|b E52 2004
245	1	1	\|a Engineering thin films and nanostructures with ion beams \|c edited by Emile Knystautas
260	#	#	\|a Boca Raton, FL : Taylor & Francis, c2005
300	#	#	\|a 574 p. \|b ill. \|c 24 c \|e + 1 CD-ROM (4 3/4 in.)
490	1	#	\|a Optical engineering \|v 92
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Thin films
650	#	0	\|a Ion bombardment \|x Industrial applications
650	#	0	\|a Nanostructures
700	1	#	\|a Knystautas, Emile J
840	#	#	\|a Optical engineering (Marcel Dekker, Inc.) ; \|v v. 92
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=338074
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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