Engineering thin films and nanostructures with ion beams

Engineering thin films and nanostructures with ion beams

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Bibliographic Details
Other Authors: Knystautas, Emile J
Format: Book
Published: Boca Raton, FL : Taylor & Francis, c2005
Series:Optical engineering 92
Subjects:
Thin films
Ion bombardment > Industrial applications
Nanostructures
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:574 p. ill. 24 c + 1 CD-ROM (4 3/4 in.)
Bibliography:Includes bibliographical references and index
ISBN:082472447X (alk. paper)

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